| Range | 30mm |
| Speed | max. 12mm/s |
| Bearing capacity | max. 150N |
| Breakdown torque (Mx, My) | max 1Nm |
| Repeatability (bidirectional) | <6µm |
| positioning error | <60µm |
| Yaw angle | <170µrad |
| pitch anle | <170µrad |
| Lateral deviation | <10µm |
| Motor operating voltage | max. 40V |
| Motor nonrelease voltage | 3,2V |
| Motor current | max. 1,8A |
| Lift pro motor revolution | 500µm |
| Steps pro motor revolution | 200 |
| Weight | 2,5kg |
| ambient operating temperatur | +10 to +50°C |